China Drying News China's domestic production of key equipment for high-brightness LED chip production on behalf of international cutting-edge equipment MOCVD (metal organic chemical vapor deposition equipment) in the Zhengtai Group Shanghai Zhangjiang Ideal Energy Equipment Co., Ltd. successfully off the assembly line on the 6th, breaking the field has long been With the monopoly of European and American companies, the domestic LED production cost is expected to drop significantly.
MOCVD is the most critical equipment in the production process of high-brightness LED chips. The market is mainly monopolized by European and American companies due to high technical difficulty, long development period, and late start of domestic industrialization.
In recent years, as the penetration of high-brightness LEDs in outdoor displays, backlighting of LCD panels, and automotive applications has continued to increase, especially in the semiconductor lighting market, the demand for mass-produced MOCVD equipment has shown an explosive growth. The annual demand reaches hundreds of units, and the market is worth billions of dollars.
China's LED epitaxial chips and packaging have achieved remarkable achievements in terms of scale and quality. The proportion of domestically produced products has increased significantly. However, key equipment, especially mass-produced MOCVD, still relies on imports, and production costs remain high, which severely restricts the LED industry. development of. Therefore, the development of a more cost-effective domestic commercial MOCVD equipment is an urgent requirement for LED epitaxial chip companies across the Taiwan Strait.
In September 2010, Ideal Energy started the MOCVD project. In two years, the ideal energy technology team designed and developed the MOCVD equipment with independent intellectual property rights, and completed the first generation of single-cavity independent equipment and high output rate. The production and assembly of the cluster production system successfully realizes the luminescence of GaN-based LED epitaxial wafers.
After nearly one year's operation of the equipment prototype, its performance has reached a predetermined target, and it passed the acceptance of the Shanghai Municipal Science and Technology Commission in May 2012. Based on the process validation results and customer feedback, a second-generation mass-production MOCVD device was developed on the basis of the first-generation prototype. A single cavity can produce 84 2-inch wafers at a time, which exceeds mainstream imported equipment.
The mass production models have been significantly improved in terms of output rate, reliability, and operating economy, and are most suitable for commercial mass production. The product has applied for 20 domestic and foreign patents.
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